An ideal lapping process that can produce both a satisfactory surface quality and improved removal efficiency is apparently still lacking for the fabrication of sapphire substrates. Water-based nanosuspensions that use inorganic nanoparticles [14], [15], [16] and/or carbon-based nanosheets [17], [18], [19] as additives have recently found ...
Lapping tests with nanosuspensions were performed on a precision lapping system (TegraPol-31, Struers, Denmark), as shown in Fig. 2.Diamond particle suspensions of sizes of 1 and 3 μm that are commercially available were used as the conventional lapping processes for comparison [5], which are assigned as D1000 and D3000, …